The Mode-Decomposition-Based Equivalent Via (MEV) Model is Proposed in This Paper, which is a Physics-Based Equivalent Model for the High-Speed Channel Modeling. the Application Ranges of the MEV Model Are Analyzed by Varying Anti-Pad Radius, Via Radius, and Distance between the Parallel Plates for a Single Via with Multiple Layers. based on the S-Parameter Comparison with Full-Wave Simulations, the MEV Model is Useful for the Insertion Loss Calculation Up to 100 GHz. Meanwhile, the Return Loss from the MEV Model Shows a High Level of Correlation with Full-Wave Simulation Results Up to 70GHz, Even When the Anti-Pad Radius is Larger Than the Commonly Used Size. the Parallel-Plate Height Has a Negligible Impact on the Accuracy of the MEV Model. This Paper Demonstrates the Large Application Range of the MEV Model and Verifies that MEV Model is Suitable for Practical High-Speed Via Analysis.