InP surfaces were patterned by microcontact printing and dip-pen nanolithography (DPN). The chemical nature and coverage of the functionalized surfaces were evaluated by X-ray photoelectron spectroscopy. The presence of all adsorbates on the surface was verified. The XPS data confirmed the covalent attachment of the adsorbates when microcontact printing was used, but no evidence for covalent bonding was observed when InP was patterned by DPN.
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