Contribution to Book
Vacuum Mechatronics ComponentsVacuum Mechatronics (1990)
In many cases the vacuum environment is utilized effectively only when it is possible to input the
power to actuate mechanisms which can do useful work. This can be accomplished by mechanical
feedthroughs or by electrical feedthroughs beyond the vacuum boundary. Power can either do the
work directly, or can be converted by an actuator into the necessary form, e.g., electrical to
mechanical by motor, shape memory alloy, or piezoelectric actuators. During the conversion and
transfer, a certain amount of heat is generated and the resulting mechanism is also a potential
source of particle contamination. Thus, the transduction mechanisms must be very efficient in
order to minimize heat generation and mechanical contact. In this section, various types of
actuators for the vacuum environment will be discussed.
PublisherArtech House, Inc.
SeriesElectronic Materials & Devices Library
Citation InformationMajid Shirazi, Lakshmanan Karuppiah and Degang Chen. "Vacuum Mechatronics Components" Norwood, MAVacuum Mechatronics (1990) p. 179 - 202
Available at: http://works.bepress.com/degang-chen/6/