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Contribution to Book
Vacuum Mechatronics Components
Vacuum Mechatronics (1990)
  • Majid Shirazi, University of California, Santa Barbara
  • Lakshmanan Karuppiah, University of California, Santa Barbara
  • Degang Chen, University of California, Santa Barbara
In many cases the vacuum environment is utilized effectively only when it is possible to input the
power to actuate mechanisms which can do useful work. This can be accomplished by mechanical
feedthroughs or by electrical feedthroughs beyond the vacuum boundary. Power can either do the
work directly, or can be converted by an actuator into the necessary form, e.g., electrical to
mechanical by motor, shape memory alloy, or piezoelectric actuators. During the conversion and
transfer, a certain amount of heat is generated and the resulting mechanism is also a potential
source of particle contamination. Thus, the transduction mechanisms must be very efficient in
order to minimize heat generation and mechanical contact. In this section, various types of
actuators for the vacuum environment will be discussed.
Publication Date
Gerardo Beni
Artech House, Inc.
Electronic Materials & Devices Library
Publisher Statement
Copyright 1990 Artech House, Inc.
Citation Information
Majid Shirazi, Lakshmanan Karuppiah and Degang Chen. "Vacuum Mechatronics Components" Norwood, MAVacuum Mechatronics (1990) p. 179 - 202
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