Skip to main content
Article
Optical Measurements and Mapping in Ga- and Al-doped ZnO and Sn-doped In2O3
Physica Status Solidi (A): Applied Research
  • David C. Look, Wright State University - Main Campus
  • Kevin D. Leedy
Document Type
Article
Publication Date
7-1-2015
Abstract

Hall-effect/conductivity measurements in TCO materials such as Ga-doped ZnO (GZO), Al-doped ZnO (AZO), and Sn-doped In2O3 (ITO) determine Hall mobility μH and sheet carrier concentration ns directly by measurements of current, voltage, and magnetic field. If thicknessd is known, then ns can be converted into volume concentration n = ns/d. Optical measurements, on the other hand, determine analogous quantities μopt and nopt indirectly, usually by invoking the Drude model of the dielectric constant. Here we compare μopt and nopt obtained by Drude analysis of reflection, transmission, and spectroscopic-ellipsometry (SE) measurements, with μH and n. Although reasonably good agreement between Hall effect and optical parameters can be obtained with all of these techniques, SE is especially attractive for non-destructive, high-density mapping of μ and n. Moreover, we can use degenerate scattering theory to convert maps of μ and n into maps of donor and acceptor concentration. This new mapping methodology is applied to GZO and ITO.

DOI
10.1002/pssa.201532020
Citation Information
David C. Look and Kevin D. Leedy. "Optical Measurements and Mapping in Ga- and Al-doped ZnO and Sn-doped In2O3" Physica Status Solidi (A): Applied Research Vol. 212 Iss. 7 (2015) p. 1427 - 1432 ISSN: 00318965
Available at: http://works.bepress.com/david_look/486/