Article
Spark Source Mass Spectrographic Analysis of Gallium Arsenide for Trace Oxygen and Carbon Using Liquid Helium Cryopumping
Analytical Letters
Document Type
Article
Publication Date
1-1-1983
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Abstract
A spark source mass spectrometric system has been developed for trace levels of oxygen and carbon in gallium arsenide using liquid helium cryopumping of the source chamber. Following bake-out, a collector positioned inside the source chamber is cooled using a controlled flow of liquid helium. Residual back-ground gases are more effectively removed than with liquid nitrogen and detectabilities of 0.02 ppma for oxygen and 0.05 ppma for carbon have been obtained. Routine analyses are carried out with a moderate consumption of liquid helium.
DOI
10.1080/00032718308065255
Citation Information
D. C. Walters, David C. Look and T. O. Tiernan. "Spark Source Mass Spectrographic Analysis of Gallium Arsenide for Trace Oxygen and Carbon Using Liquid Helium Cryopumping" Analytical Letters Vol. 16 Iss. 17-18 (1983) p. 1427 - 1434 ISSN: 0003-2719 Available at: http://works.bepress.com/david_look/427/