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Article
Annealing Dynamics of Molecular-Beam Epitaxial GaAs Grown at 200°C
Journal of Applied Physics
  • David C. Look, Wright State University - Main Campus
  • D. C. Walters
  • G. D. Robinson
  • J. R. Sizelove
  • M. G. Mier
  • C. E. Stutz
Document Type
Article
Publication Date
7-1-1993
Abstract

By separating a 2‐μm‐thick molecular‐beam‐epitaxial GaAs layer grown at 200 °C from its 650‐μm‐thick substrate, we have been able to obtain accurate Hall‐effect and conductivity data as functions of annealing temperature from 300 to 600 °C. At a measurement temperature of 300 K, analysis confirms that hopping conduction is much stronger than band conduction for all annealing temperatures. However, at higher measurement temperatures (up to 500 K), the band conduction becomes comparable, and a detailed analysis yields the donor and acceptor concentrations and the donor activation energy. Also, an independent absorption study yields the total and charged AsGa concentrations. Comparisons of all of these quantities as a function of annealing temperature TA show a new feature of the annealing dynamics, namely, that the dominant acceptor (probably VGa related) strongly decreases and then increases as TA is increased from 350 to 450 °C. Above 450 °C, ND, NA, and [AsGa] all decrease, as is known from previous studies.

Comments

Copyright © 1993, American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in the Journal of Applied Physics 74.1, and may be found at http://jap.aip.org/resource/1/japiau/v74/i1/p306_s1

DOI
10.1063/1.354108
Citation Information
David C. Look, D. C. Walters, G. D. Robinson, J. R. Sizelove, et al.. "Annealing Dynamics of Molecular-Beam Epitaxial GaAs Grown at 200°C" Journal of Applied Physics Vol. 74 Iss. 1 (1993) p. 306 - 310 ISSN: 0021-8979
Available at: http://works.bepress.com/david_look/41/