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Article
Electrical Characteristics of a 6H-SiC Epitaxial Layer Grown by Chemical Vapor Deposition on Porous SiC Substrate
Journal of Electronic Materials
  • C. Look, Wright State University - Main Campus
  • Z-Q. Fang
  • R. Chandrsekaran
  • S. Rao
  • S. E. Saddow
Document Type
Article
Publication Date
1-1-2004
Abstract

Porous SiC (PSC) has been proposed as a buffer layer for reducing defects in epitaxial SiC layers. In this study, electrical characteristics of a 6H-SiC epitaxial layer grown by chemical vapor deposition on a porous SiC substrate (SiC-on-PSC) have been compared to those simultaneously grown on a standard SiC substrate (SiC-on-STD). Schottky barrier diodes (SBDs) have been fabricated on both epitaxial layers and then investigated with temperature-dependent current-voltage (I-V), capacitance-voltage (C-V), and deep-level transient spectroscopy (DLTS) measurements. The SBDs on both SiC-on-PSC and SiC-on-STD show about the same I-V and C-V characteristics, and at least four electron traps, i.e., B (0.75 eV), C (0.63 eV), D (0.40 eV), and E (0.16 eV), can be identically found in both SBDs by DLTS measurements. Thus, we conclude that the electrical quality of SiC-on-PSC is comparable to that of SiC-on-STD, and that the higher breakdown voltages observed in SBDs on SiC-on-PSC are not obviously related to a different defect structure.

DOI
10.1007/s11664-004-0202-y
Citation Information
C. Look, Z-Q. Fang, R. Chandrsekaran, S. Rao, et al.. "Electrical Characteristics of a 6H-SiC Epitaxial Layer Grown by Chemical Vapor Deposition on Porous SiC Substrate" Journal of Electronic Materials Vol. 33 Iss. 5 (2004) p. 456 - 459 ISSN: 0361-5235
Available at: http://works.bepress.com/david_look/303/