"Modification of Surface Characteristics in GaAs With Dry Processing" by Y. Chung

Selected Works of David C. Look

Article

Modification of Surface Characteristics in GaAs With Dry Processing

IEEE Transactions on Electron Devices

Y. Chung
D. W. Langer
R. Becker
C. Look, Wright State University - Main Campus

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Document Type

Article

Publication Date

1-1-1985

Disciplines

Physical Sciences and Mathematics and
Physics

DOI

10.1109/T-ED.1985.21906

Citation Information

Y. Chung, D. W. Langer, R. Becker and C. Look. "Modification of Surface Characteristics in GaAs With Dry Processing" IEEE Transactions on Electron Devices Vol. 32 Iss. 1 (1985) p. 40 - 44 ISSN: 0018-9383
Available at: http://works.bepress.com/david_look/225/