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Article
Synthesis of P-Type ZnO Films
Journal of Crystal Growth
  • Y. R. Ryu
  • S. Zhu
  • David C. Look, Wright State University - Main Campus
  • J. M. Wrobel
  • H. M. Jeong
  • H. W. White
Document Type
Article
Publication Date
6-15-2000
Abstract

p-Type ZnO obtained by arsenic (As) doping is reported for the first time. Arsenic-doped ZnO (ZnO:As) films have been deposited on (001)-GaAs substrates by pulsed laser ablation. The process of synthesizing p-type ZnO:As films was performed in an ambient gas of ultra-pure (99.999%) oxygen. The ambient gas pressure was 35mTorr with the substrate temperature in the range 300–450°C. ZnO films grown at 400°C and 450°C are p-type and As is a good acceptor. The acceptor peak is located at 3.32eV and its binding energy is about 100meV. Acceptor concentrations of As atoms in ZnO films were in the range from high 1017 to high 1021atoms/cm3 as determined by secondary ion mass spectroscopy (SIMS) and Hall effect measurements.

DOI
10.1016/S0022-0248(00)00437-1
Citation Information
Y. R. Ryu, S. Zhu, David C. Look, J. M. Wrobel, et al.. "Synthesis of P-Type ZnO Films" Journal of Crystal Growth Vol. 216 Iss. 1-4 (2000) p. 330 - 334 ISSN: 0022-0248
Available at: http://works.bepress.com/david_look/191/