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Presentation
Fabrication of a Nanoscale Electrical Thermometry Platform for 2D Materials
2020 Undergraduate Research Showcase
  • Annalies G. Tipton, Boise State University
  • Karen Perez, Boise State University
  • Elton Graugnard, Boise State University
  • David Estrada, Boise State University
Document Type
Student Presentation
Presentation Date
4-24-2020
Faculty Sponsor
Dr. Elton Graugnard and Dr. David Estrada
Abstract

Nanoscale electrical thermometry is a technique for characterizing thermal properties of 2D materials. Fabrication of a nanoscale electrical thermometry platform requires the use of nanoscale processing techniques, such as electron beam lithography (EBL) and photolithography. In both processes, a polymer layer (resist) is deposited onto a semiconducting substrate. In EBL, a fine beam of electrons is used to write a pattern in the resist. EBL can get down to a resolution of 10 nm. In photolithography the pattern is formed by ultraviolet light passing through a mask. In both cases, exposure of the resist changes its solubility, and the exposed wafers are then processed to remove exposed portions of the resist to reveal the pattern. From there the pattern can be transferred to the substrate by etching (subtractive) or deposition (additive). We repeat this process multiple times to build the thermometry platform, which is then used to measure the thermal conductivity of 2D materials.

Citation Information
Annalies G. Tipton, Karen Perez, Elton Graugnard and David Estrada. "Fabrication of a Nanoscale Electrical Thermometry Platform for 2D Materials" (2020)
Available at: http://works.bepress.com/david_estrada/91/