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Selected Works of David Veazie
Article
Electroplated metal microstructures embedded in fusion-bonded silicon: conductors and magnetic materials
IEEE\/ASME Journal of Microelectromechanical Systems (2004)
  • David P. Arnold, Georgia Institute of Technology
  • Florent Cros, Georgia Institute of Technology
  • Iulica Zana, Georgia Institute of Technology
  • David R. Veazie
  • Mark G. Allen, Georgia Institute of Technology
Link
Disciplines
Publication Date
October 1, 2004
DOI
10.1109/JMEMS.2004.835770
Citation Information
David P. Arnold, Florent Cros, Iulica Zana, David R. Veazie, et al.. "Electroplated metal microstructures embedded in fusion-bonded silicon: conductors and magnetic materials" IEEE\/ASME Journal of Microelectromechanical Systems Vol. 13 Iss. 5 (2004) p. 791 - 798
Available at: http://works.bepress.com/david-veazie/12/