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Article
Broadband Measurement of ESD Risetimes to Distinguish between Different Discharge Mechanisms
Journal of Electrostatics
  • Sven Bönisch
  • David Pommerenke, Missouri University of Science and Technology
  • Wilifried Kalkner
Abstract
Different discharge mechanisms are possible for electrostatic discharge below 2000 V breakdown voltage as a function of the parameters gap distance, breakdown voltage, electrode material and gas pressure. In this paper, risetime measurement data of electrostatic discharges, measured at about 8 GHz bandwidth, are presented as a function of these parameters. Electrode SEM photographs (scanning electron microscope) helps to understand the influence of electrode surface. This provides information about the development of ESD and helps to increase their reproducibility.
Department(s)
Electrical and Computer Engineering
Sponsor(s)
German Research Association
Keywords and Phrases
  • CMD Testing,
  • ESD Discharge Mechanisms,
  • ESD Reproductivity,
  • ESD Risetimes,
  • Arc Formation,
  • Breakdown Voltage,
  • Reproducibility,
  • Short Gap,
  • Surface Process
Document Type
Article - Journal
Document Version
Citation
File Type
text
Language(s)
English
Rights
© 2002 Elsevier, All rights reserved.
Publication Date
10-1-2002
Citation Information
Sven Bönisch, David Pommerenke and Wilifried Kalkner. "Broadband Measurement of ESD Risetimes to Distinguish between Different Discharge Mechanisms" Journal of Electrostatics (2002)
Available at: http://works.bepress.com/david-pommerenke/50/