Effect of Plasma Flux Composition on the Nitriding Rate of Stainless SteelJournal of Vacuum Science & Technology A
AbstractThe total ion flux and nitriding rate for stainless steel specimens exposed to a modulated electron beam generated argon-nitrogen plasma were measured as a function of distance from the electron beam axis. The total ion flux decreased linearly with distance, but the nitriding rate increased under certain conditions, contrary to other ion flux/nitriding rate comparisons published in the literature. Variation in ion flux composition with distance was explored with a mass spectrometer and energy analyzer as a possible explanation for the anomalous nitriding rate response to ion flux magnitude. A transition in ion flux composition from mostly N2 1 to predominantly N1 ions with increasing distance was observed. Significant differences in molecular and atomic nitrogen ion energy distributions at a negatively biased electrode were also measured. An explanation for nitriding rate dependence based on flux composition and magnitude is proposed.
Document VersionPublished Version
CopyrightCopyright © 2004, American Vacuum Society
PublisherAmerican Vacuum Society
Sponsoring AgencyOffice of Naval Research
Citation InformationChristopher Muratore, Scott G. Walton, D. Leonhardt, Richard F. Fernsler, et al.. "Effect of Plasma Flux Composition on the Nitriding Rate of Stainless Steel" Journal of Vacuum Science & Technology A Vol. 22 Iss. 4 (2004)
Available at: http://works.bepress.com/christopher-muratore/5/