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Effect of Plasma Flux Composition on the Nitriding Rate of Stainless Steel
Journal of Vacuum Science & Technology A
  • Christopher Muratore, University of Dayton
  • Scott G. Walton, Naval Research Laboratory
  • D. Leonhardt, Naval Research Laboratory
  • Richard F. Fernsler, Naval Research Laboratory
  • David D. Blackwell, Naval Research Laboratory
  • R. A. Meger, Naval Research Laboratory
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The total ion flux and nitriding rate for stainless steel specimens exposed to a modulated electron beam generated argon-nitrogen plasma were measured as a function of distance from the electron beam axis. The total ion flux decreased linearly with distance, but the nitriding rate increased under certain conditions, contrary to other ion flux/nitriding rate comparisons published in the literature. Variation in ion flux composition with distance was explored with a mass spectrometer and energy analyzer as a possible explanation for the anomalous nitriding rate response to ion flux magnitude. A transition in ion flux composition from mostly N2 1 to predominantly N1 ions with increasing distance was observed. Significant differences in molecular and atomic nitrogen ion energy distributions at a negatively biased electrode were also measured. An explanation for nitriding rate dependence based on flux composition and magnitude is proposed.
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American Vacuum Society
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Citation Information
Christopher Muratore, Scott G. Walton, D. Leonhardt, Richard F. Fernsler, et al.. "Effect of Plasma Flux Composition on the Nitriding Rate of Stainless Steel" Journal of Vacuum Science & Technology A Vol. 22 Iss. 4 (2004)
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