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Selected Works of Chester Wilson
Article
Silicon micromachining using in situ DC microplasmas
IEEE\/ASME Journal of Microelectromechanical Systems (2001)
  • Chester G. Wilson, University of Wisconsin-Madison
  • Yogesh B. Gianchandani
Link
Disciplines
Publication Date
March 1, 2001
DOI
10.1109/84.911091
Citation Information
Chester G. Wilson and Yogesh B. Gianchandani. "Silicon micromachining using in situ DC microplasmas" IEEE\/ASME Journal of Microelectromechanical Systems Vol. 10 Iss. 1 (2001) p. 50 - 54
Available at: http://works.bepress.com/chester-wilson/51/