"Room temperature deposition of silicon by arrayed DC microplasmas" by C.G. Wilson

Selected Works of Chester Wilson

Article

Room temperature deposition of silicon by arrayed DC microplasmas

International Conference on Micro Electro Mechanical Systems (2004)

C.G. Wilson, University of Michigan
Y.B. Gianchandani, University of Michigan

Link

Disciplines

Materials Science and Engineering and
Analytical Chemistry

Publication Date

January 1, 2004

DOI

10.1109/MEMS.2004.1290697

Citation Information

C.G. Wilson and Y.B. Gianchandani. "Room temperature deposition of silicon by arrayed DC microplasmas" International Conference on Micro Electro Mechanical Systems (2004) p. 765 - 768
Available at: http://works.bepress.com/chester-wilson/44/