Article
Profiling and modeling of dc nitrogen microplasmas
Journal of Applied Physics
(2003)
Disciplines
Publication Date
September 1, 2003
DOI
10.1063/1.1595143
Citation Information
Chester G. Wilson, Yogesh B. Gianchandani, Robert R. Arslanbekov, Vladimir Kolobov, et al.. "Profiling and modeling of dc nitrogen microplasmas" Journal of Applied Physics Vol. 94 Iss. 5 (2003) p. 2845 - 2851 Available at: http://works.bepress.com/chester-wilson/42/