Article
A bulk silicon micromachined structure for gas microdischarge-based detection of beta-particles
Journal of Micromechanics and Microengineering
(2008)
Publication Date
September 1, 2008
DOI
10.1088/0960-1317/18/9/095007
Citation Information
Christine Kay Eun, Chester Goodwin Wilson and Yogesh B. Gianchandani. "A bulk silicon micromachined structure for gas microdischarge-based detection of beta-particles" Journal of Micromechanics and Microengineering Vol. 18 Iss. 9 (2008) p. 95007 Available at: http://works.bepress.com/chester-wilson/32/