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Article
A bulk silicon micromachined structure for gas microdischarge-based detection of beta-particles
Journal of Micromechanics and Microengineering (2008)
  • Christine Kay Eun, University of Michigan
  • Chester Goodwin Wilson, University of Michigan
  • Yogesh B. Gianchandani, University of Michigan
Publication Date
September 1, 2008
DOI
10.1088/0960-1317/18/9/095007
Citation Information
Christine Kay Eun, Chester Goodwin Wilson and Yogesh B. Gianchandani. "A bulk silicon micromachined structure for gas microdischarge-based detection of beta-particles" Journal of Micromechanics and Microengineering Vol. 18 Iss. 9 (2008) p. 95007
Available at: http://works.bepress.com/chester-wilson/32/