"Selective Deposition of Silicon at Room Temperature Using DC Microplasmas" by Chester G. Wilson

Selected Works of Chester Wilson

Article

Selective Deposition of Silicon at Room Temperature Using DC Microplasmas

IEEE Transactions on Plasma Science (2007)

Chester G. Wilson, University of Michigan
Yogesh B. Gianchandani, University of Michigan

Link

Disciplines

Atomic, Molecular and Optical Physics,
Physics and
Semiconductor and Optical Materials

Publication Date

June 1, 2007

DOI

10.1109/TPS.2007.897412

Citation Information

Chester G. Wilson and Yogesh B. Gianchandani. "Selective Deposition of Silicon at Room Temperature Using DC Microplasmas" IEEE Transactions on Plasma Science Vol. 35 Iss. 3 (2007) p. 573 - 577
Available at: http://works.bepress.com/chester-wilson/29/