"Introducing porous silicon as a getter using the self aligned maskless process to enhance the quality factor of packaged MEMS resonators" by Wajihuddin Mohammad

Article

Introducing porous silicon as a getter using the self aligned maskless process to enhance the quality factor of packaged MEMS resonators

European Frequency and Time Forum (2011)

Wajihuddin Mohammad, Louisiana Tech University
Chester Wilson, Louisiana Tech University
Ville Kaajakari, Louisiana Tech University

Link

Disciplines

Materials Science and Engineering and
Electrical and Electronics

Publication Date

May 1, 2011

DOI

10.1109/FCS.2011.5977875

Citation Information

Wajihuddin Mohammad, Chester Wilson and Ville Kaajakari. "Introducing porous silicon as a getter using the self aligned maskless process to enhance the quality factor of packaged MEMS resonators" European Frequency and Time Forum (2011) p. 1 - 4
Available at: http://works.bepress.com/chester-wilson/14/