Article
A New Approch to Low Drift Ta₂O₅ by pH Reactive Sputtering and Sol-Gel Method
Proceedings of the 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX. Transducers '95. (1995, Stockholm, Sweden)
Meeting Name
8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX. Transducers '95. (1995, Stockholm, Sweden)
Department(s)
Electrical and Computer Engineering
Second Department
Chemical and Biochemical Engineering
Document Type
Article - Conference proceedings
Document Version
Final Version
File Type
text
Language(s)
English
Rights
© 1995 Institute of Electrical and Electronics Engineers (IEEE), All rights reserved.
Publication Date
1-1-1995
Publication Date
01 Jan 1995
Disciplines
Citation Information
Chang-Soo Kim, Dae-Hyuk Kwon, Byung-Woog Cho and Byung-Ki Sohn. "A New Approch to Low Drift Ta₂O₅ by pH Reactive Sputtering and Sol-Gel Method" Proceedings of the 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX. Transducers '95. (1995, Stockholm, Sweden) (1995) Available at: http://works.bepress.com/chang-soo-kim/2/