Article
Improved Crystalline Quality of Si1-xGex Formed by Low-temperature Germanium Ion Implantation
Electrical and Computer Engineering
Document Type
Article
Publication Date
1-27-1992
Publisher
American Institute of Physics Publishing
Disciplines
Abstract
Improvement of crystalline quality in Si1-xGex formed by germanium ion implantation has been found. End‐of‐range defects were drastically reduced in number by lowering the substrate temperature during implantation with doses on the order of 1016 cm−2. This improvement was confirmed by electrical characterization of p‐n junctions formed in the SiGe layer as well as by transmission electron microscopy.
Citation Information
K. Shoji, A. Fukami, T. Nagano, T. Tokuyama, and C.Y. Yang, “Improved Crystalline Quality of Si1-xGex Formed by Low-temperature Germanium Ion Implantation,” Applied Physics Letters 60, 451-453 (1992). https://doi.org/10.1063/1.106631
Copyright © 1992 American Institute of Physics Publishing. Reprinted with permission.