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Article
Direct Determination of Interface Trapped Charges
Electrical and Computer Engineering
  • Cary Y. Yang, Santa Clara University
  • Hiroshi Inokawa
  • Felino E. Pagaduan
Document Type
Article
Publication Date
5-1-1991
Publisher
IOP Publishing
Abstract

A technique to determine the interface trapped charge, Qit, from C-V and I-V measurements is introduced. This Qit technique is free from the assumptions used in the conventional methods for determining the density of interface traps, Dit. The technique is applied to current-stressed metal-oxide-semiconductor (MOS) capacitors with different oxide thicknesses and found to be useful in revealing donor- and acceptor-type characteristics of interface traps.

Citation Information
C.Y. Yang, H. Inokawa, and F.E. Pagaduan, “Direct Determination of Interface Trapped Charges,” Japanese Journal of Applied Physics 30, L888-890 (1991).