"Characterization of Germanium Implanted Si1-xGex Layer" by Ashawant Gupta

Cary Y. Yang

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Characterization of Germanium Implanted Si1-xGex Layer

Electrical and Computer Engineering

Ashawant Gupta
Carmen Cook
Len Toyoshiba
Jianmin Qiao
Cary Y. Yang, Santa Clara University
Ken-Ichi Shoji
Akira Fukami
Takashi Tokuyama

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Document Type

Article

Publication Date

1-1-1993

Publisher

Springer-Verlag

Disciplines

Electrical and Computer Engineering

Citation Information

A. Gupta, C. Cook, L. Toyoshiba, J. Qiao, and C.Y. Yang, K. Shoji, A. Fukami, T. Nagano, and T. Tokuyama, “Characterization of Germanium Implanted Si1-xGex Layer,” Journal of Electronic Materials 22, 125-128 (1993).