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Article
Bright-field transmission imaging of carbon nanofibers on bulk substrate using conventional scanning electron microscopy
Electrical and Computer Engineering
  • Makoto Suzuki
  • Quoc Ngo
  • Hirohiko Kitsuki
  • Kristofer Gleason
  • Yusuke Ominami
  • Cary Y. Yang, Santa Clara University
Document Type
Article
Publication Date
9-1-2007
Publisher
American Institute of Physics Publishing
Abstract

The authors present scanning transmission electron microscopy (STEM) of carbon nanofibers (CNFs) on a bulk substrate using conventional scanning electron microscopy (SEM) without specimen thinning. By utilizing the electron beam tilted >85° from the substrate normal, bright-field STEM contrast is obtained for the CNFs on substrate with conventional SEM. Analysis of the observed contrast using Monte Carlo simulation shows that the weakly scattered electrons transmitted from the CNF are selectively enhanced by the largely tilted substrate and result in the observed STEM contrast. This mechanism provides a useful STEM imaging technique to investigate the internal structure of materials on bulk substrates without destructive specimen thinning.

Comments

Copyright © 2007 American Institute of Physics Publishing. Reprinted with permission.

Citation Information
M. Suzuki, Q. Ngo, H. Kitsuki, K. Gleason, Y. Ominami, and C.Y. Yang, "Bright-field transmission imaging of carbon nanofibers on bulk substrate using conventional scanning electron microscopy," Journal of Vacuum Science & Technology B25, 1615-1621 (2007). https://doi.org/10.1116/1.2775457