A method to extract the contact resistance and bulk resistivity of vertically grown carbon nanofibers (CNFs) or similar one-dimensional nanostructures is described. Using a silicon-compatible process to fabricate a terrace test structure needed for the CNF length variation, the contact resistance is extracted by measuring in situ the resistances of individual CNFs with different lengths and within a small range of diameters using a nanoprober inside a scanning electron microscope. Accurate determination of contact resistances for various combinations of catalysts and underlayer metals can lead to eventual optimization of materials’ growth and device fabrication processes for CNF via interconnects.