Article
Amorphous silicon-hydrogen-fluorine-oxygen alloys
Journal of Non-crystalline Solids
(1980)
Abstract
Amorphous silicon-hydrogen-fluorine-oxygen alloys have been grown by the plasma deposition of a SiF4/H2 gas mixture. The composition and optical properties of these alloys are very similar to those of Knights' amorphous silicon-hydrogen alloys, but are significantly different from those of Ovshinsky and Madan's amorphous silicon-fluorine-hydrogen alloys.
Disciplines
Publication Date
January 1, 1980
DOI
10.1016/0022-3093(80)90612-2
Citation Information
Bernard J. Feldman. "Amorphous silicon-hydrogen-fluorine-oxygen alloys" Journal of Non-crystalline Solids (1980) p. 309 - 312 Available at: http://works.bepress.com/bernard-feldman/66/