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Amorphous silicon-hydrogen-fluorine-oxygen alloys
Journal of Non-crystalline Solids (1980)
  • Bernard J. Feldman, University of Missouri–St. Louis
Amorphous silicon-hydrogen-fluorine-oxygen alloys have been grown by the plasma deposition of a SiF4/H2 gas mixture. The composition and optical properties of these alloys are very similar to those of Knights' amorphous silicon-hydrogen alloys, but are significantly different from those of Ovshinsky and Madan's amorphous silicon-fluorine-hydrogen alloys.
Publication Date
January 1, 1980
Citation Information
Bernard J. Feldman. "Amorphous silicon-hydrogen-fluorine-oxygen alloys" Journal of Non-crystalline Solids (1980) p. 309 - 312
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