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Microhardness, Structure, and Composition Study of Amorphous Hydrogenated Boron Carbide
MRS Proceedings (1995)
  • Shu-Han Lin, University of Missouri–St. Louis
  • Dong Li, Northwestern University
  • Bernard J. Feldman, University of Missouri–St. Louis
We have grown amorphous hydrogenated boron carbide thin films by rf plasma decomposition of diborane and methane. The chemical composition, infrared absorption, optical absorption, and microhardness of these thin films were measured. As a function of increasing diborane concentration in the feedstock, we observe increasing boron and hydrogen concentrations, increasing infrared absorption at 1330 cm−1 due to boron icosahedra, increasing optical bandgaps, and an unchanging microhardness in the grown films. The microhardness should have decreased due to the increasing hydrogen concentration; this expected decrease may have been balanced by an increased microhardness due to the boron icosahedra.
Publication Date
January 1, 1995
Citation Information
Shu-Han Lin, Dong Li and Bernard J. Feldman. "Microhardness, Structure, and Composition Study of Amorphous Hydrogenated Boron Carbide" MRS Proceedings Vol. 383 (1995) p. 127
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