Article
Microhardness, Structure, and Composition Study of Amorphous Hydrogenated Boron Carbide
MRS Proceedings
(1995)
Abstract
We have grown amorphous hydrogenated boron carbide thin films by rf plasma decomposition of diborane and methane. The chemical composition, infrared absorption, optical absorption, and microhardness of these thin films were measured. As a function of increasing diborane concentration in the feedstock, we observe increasing boron and hydrogen concentrations, increasing infrared absorption at 1330 cm−1 due to boron icosahedra, increasing optical bandgaps, and an unchanging microhardness in the grown films. The microhardness should have decreased due to the increasing hydrogen concentration; this expected decrease may have been balanced by an increased microhardness due to the boron icosahedra.
Disciplines
Publication Date
January 1, 1995
DOI
10.1557/PROC-383-127
Citation Information
Shu-Han Lin, Dong Li and Bernard J. Feldman. "Microhardness, Structure, and Composition Study of Amorphous Hydrogenated Boron Carbide" MRS Proceedings Vol. 383 (1995) p. 127 Available at: http://works.bepress.com/bernard-feldman/37/