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Microhardness study of cathode-mounted amorphous hydrogenated boron carbide
MRS Proceedings (1996)
  • S.H. Lin, University of Missouri–St. Louis
  • B.J. Feldman, University of Missouri
  • D. Li, Northwestern University
We have grown cathode-mounted amorphous hydrogenated boron carbide thin films by rf plasma decomposition of diborane and methane. The chemical composition, infrared absorption, optical absorption, microhardness and adhesion of these thin films were measured. As a function of increasing diborane concentration in the feedstock, we observe increasing boron and decreasing hydrogen concentrations, increasing infrared absorption at 1300 cm-1 due to boron icosahedra, increasing optical band gaps, dramatically increased microhardness, and increased adhesion to the underlying substrates of these thin films. These results provide evidence that the presence of boron icosahedra increases microhardness, adhesion, and optical band gaps.
Publication Date
January 1, 1996
Citation Information
S.H. Lin, B.J. Feldman and D. Li. "Microhardness study of cathode-mounted amorphous hydrogenated boron carbide" MRS Proceedings Vol. 436 (1996)
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