Contribution to Book
A High-Speed Polar-Symmetric Imager for Real-Time Calibration of Rotational Inertial Sensors
IEEE Sensors 2013: Proceedings
(2013)
Abstract
We present a high-speed (> 1kfps), circular, CMOS imaging array for contact-less, optical measurement of rotating inertial sensors. The imager is designed for real-time optical readout and calibration of a MEMS accelerometer revolving at greater than 1000rpm. The imager uses a uniform circular arrangement of pixels to enable rapid imaging of rotational objects. Furthermore, each photodiode itself is circular to maintain uniform response throughout the entire revolution. Combining a high frame rate and a uniform response to motion, the imager can achieve sub-pixel resolution (25nm) of the displacement of microscale features. In order to avoid fixed pattern noise arising from non-uniform routing within the array we implemented a new global shutter technique that is insensitive to parasitic capacitance. To ease integration with various MEMS platforms, the system has SPI control, on-chip bias generation, sub-array imaging, and digital data read-out.Â
Keywords
- arrays,
- photodiodes,
- optical sensors,
- image sensors,
- noise,
- accelerometers
Disciplines
Publication Date
2013
Publisher
IEEE
ISBN
978-1-4673-4642-9
DOI
10.1109/ICSENS.2013.6688496
Citation Information
Ben Johnson, Changhyuk Lee, Sriram Sivaramakrishnan and Alyosha Molnar. "A High-Speed Polar-Symmetric Imager for Real-Time Calibration of Rotational Inertial Sensors" IEEE Sensors 2013: Proceedings (2013) Available at: http://works.bepress.com/benjamin-johnson01/9/