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Article
A Polar Symmetric CMOS Image Sensor for Rotation Invariant Measurement
IEEE Sensors Journal
(2016)
Abstract
We present a CMOS image sensor for efficient capture of polar symmetric imaging targets. The array uses circular photodiodes, arranged in concentric rings to capture, for example, diffraction patterns generated by optically probing a revolving MEMS device. The chip is designed with a vacant, central spot to facilitate the easy single-axis alignment of the probing illumination, target device, and detector. Imaging of high-speed rotation (>1 kfps) is made possible by dividing the array into multiple concentric bands with sectorwise addressing control. We introduce a global shutter pixel reset scheme that reduces fixed pattern noise by being insensitive to parasitic capacitance from variable routing. We demonstrate the sensor’s capability to measure the rotation angle with a precision of 32 µrad and the rotation rates up to 300 rpm. Finally, we demonstrate the concept of a compact optical metrology system for continuous inertial sensor calibration by imaging the diffraction pattern created by a commercial MEMS accelerometer probed by a red laser shone through the axis of symmetry of the image sensor.
Keywords
- CMOS,
- image sensor,
- circular,
- low noise,
- FPN,
- polar coordinate
Disciplines
Publication Date
March 1, 2016
DOI
10.1109/JSEN.2015.2495190
Citation Information
Sriram Sivaramakrishnan, Changhyuk Lee, Ben Johnson and Alyosha Molnar. "A Polar Symmetric CMOS Image Sensor for Rotation Invariant Measurement" IEEE Sensors Journal Vol. 16 Iss. 5 (2016) p. 1190 - 1199 Available at: http://works.bepress.com/benjamin-johnson01/1/