Article
Electronic and optical properties of MoS2 thin films deposited by magnetron sputtering studying
IOP Conference Series: Materials Science and Engineering
(2020)
Abstract
The article presents the optical spectroscopy results of molybdenum disulfide ultrathin films deposited on Si substrates by the methods of direct current (DCMS) and pulsed (PMS) magnetron sputtering MoS2 target in vacuum, and also at flow deposition under the influence of external magnetic field on the substrate. Furthermore, the article revues the results of optical bandgap calculation for all samples of MoS2 thin films.
Disciplines
Publication Date
Spring April 8, 2020
DOI
10.1088/1757-899X/781/1/012020
Citation Information
Andrey Belikov. "Electronic and optical properties of MoS2 thin films deposited by magnetron sputtering studying" IOP Conference Series: Materials Science and Engineering (2020) Available at: http://works.bepress.com/andrey-belikov-mt/1/