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Selected Works of Andrew Peters
Article
Effect of chemoepitaxial guiding underlayer design on the pattern quality and shape of aligned lamellae for fabrication of line-space patterns
Proceedings of SPIE (2015)
  • Benjamin D. Nation, Georgia Institute of Technology
  • Andrew Peters, Georgia Institute of Technology
  • Richard A. Lawson, Georgia Institute of Technology
  • Peter J. Ludovice, Georgia Institute of Technology
  • Clifford L. Henderson, Georgia Institute of Technology
Link
Disciplines
Publication Date
March 19, 2015
DOI
10.1117/12.2085526
Citation Information
Benjamin D. Nation, Andrew Peters, Richard A. Lawson, Peter J. Ludovice, et al.. "Effect of chemoepitaxial guiding underlayer design on the pattern quality and shape of aligned lamellae for fabrication of line-space patterns" Proceedings of SPIE Vol. 9423 (2015)
Available at: http://works.bepress.com/andrew-peters/8/