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Understanding defects in DSA: calculation of free energies of block copolymer DSA systems via thermodynamic integration of a mesoscale block-copolymer model
Proceedings of SPIE (2014)
  • Andrew J. Peters, Georgia Institute of Technology
  • Richard A. Lawson, Georgia Institute of Technology
  • Benjamin D. Nation, Georgia Institute of Technology
  • Peter J. Ludovice, Georgia Institute of Technology
  • Clifford L. Henderson, Georgia Institute of Technology
Publication Date
March 28, 2014
DOI
10.1117/12.2046664
Citation Information
Andrew J. Peters, Richard A. Lawson, Benjamin D. Nation, Peter J. Ludovice, et al.. "Understanding defects in DSA: calculation of free energies of block copolymer DSA systems via thermodynamic integration of a mesoscale block-copolymer model" Proceedings of SPIE Vol. 9049 (2014)
Available at: http://works.bepress.com/andrew-peters/10/