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Ultra-hard low friction coating based on A1MgB14 for reduced wear of MEMS and other tribological components and system
Iowa State University Patents
  • Bruce Allan Cook
  • Yun Tian
  • Joel Lee Harringa
  • Alan Paul Constant
  • Alan M. Russell, Iowa State University
  • Palaniappa A. Molian
Document Type
Patent
Publication Date
7-3-2007
Disciplines
Abstract
Performance and reliability of microelectromechanical system (MEMS) components enhanced dramatically through the incorporation of protective thin film coatings. Current-generation MEMS devices prepared by the LIGA technique employ transition metals such as Ni, Cu, Fe, or alloys thereof, and hence lack stability in oxidizing, corrosive, and/or high temperature environments. Fabrication of a superhard, self-lubricating coating based on a ternary boride compound AlMgB14 is described in this letter as a potential breakthrough in protective coating technology for LIGA microdevices. Nanoindentation tests show that hardness of AlMgB14 films prepared by pulsed laser deposition ranges from 45 GPa to 51 GPa, when deposited at room temperature and 573 K, respectively. Extremely low friction coefficients of 0.04-0.05, which are thought to result from a self-lubricating effect, have also been confirmed by nanoscratch tests on the AlMgB14 films. Transmission electron microscopy studies show that the as-deposited films are amorphous, regardless of substrate temperature; however, analysis of FTIR spectra suggests that the higher substrate temperature facilitates formation of the B12 icosahedral framework, therefore leading to the higher hardness.
Patent Number
US 7,238,429 B2
Assignee
Iowa State University Research Foundation, Inc.
Application Number
10/946,051
Date Filed
9-21-2004
Language
en
File Format
application/pdf
Citation Information
Bruce Allan Cook, Yun Tian, Joel Lee Harringa, Alan Paul Constant, et al.. "Ultra-hard low friction coating based on A1MgB14 for reduced wear of MEMS and other tribological components and system" (2007)
Available at: http://works.bepress.com/alan_russell/14/