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Article
The direct patterning of nanoporous interlayer dielectric insulator films by nanoimprint lithography
Polymer Engineering Faculty Research
  • Alamgir Karim
Document Type
Article
Publication Date
10-1-2007
Abstract

The Direct Patterning of Nanoporous Interlayer Dielectric Insulator Films by Nanoimprint Lithography Official contribution of the National Institute of Standards and Technology; not subject to copyright in the United States. The error bars presented throughout this manuscript indicate the relative standard uncertainty of the measurement. Certain commercial materials and equipment are identified in this paper in order to specify adequately the experimental procedure. In no case does such identification imply recommendation by the National Institute of Standards and Technology nor does it imply that the material or equipment identified is necessarily the best available for this purpose.

Citation Information
Alamgir Karim. "The direct patterning of nanoporous interlayer dielectric insulator films by nanoimprint lithography" Vol. 19 (2007) p. 19
Available at: http://works.bepress.com/alamgit_karim/41/