"Self-sealing of nanoporous low dielectric constant patterns fabricated by nanoimprint lithography" by Alamgir Karim

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Self-sealing of nanoporous low dielectric constant patterns fabricated by nanoimprint lithography

Polymer Engineering Faculty Research

Alamgir Karim

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Document Type

Article

Publication Date

10-1-2008

Disciplines

Chemical Engineering and
Engineering

Citation Information

Alamgir Karim. "Self-sealing of nanoporous low dielectric constant patterns fabricated by nanoimprint lithography" Vol. 10 (2008) p. 20
Available at: http://works.bepress.com/alamgit_karim/32/