Mechanical and electrical evaluation of parylene-C encapsulated carbon nanotube networks on a flexible substrate

Chia-Ling Chen, Northeastern University - Dept. of Electrical and Computer Engineering
Ernesto Lopez, Northeastern University - Dept. of Mechanical and Industrial Engineering
Yung-Joon Jung, Northeastern University - Dept. of Mechanical and Industrial Engineering
Sinan Müftü, Northeastern University - Dept. of Electrical and Computer Engineering
Selvapraba Selvarasah, Northeastern University - Dept. of Electrical and Computer Engineering
Mehmet R. Dokmeci, Northeastern University - Dept. of Electrical and Computer Engineering

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Originally published in Applied Physics Letters, v.93 no.9 (2008). DOI:10.1063/1.2976633

Abstract

Carbon nanotube networks are an emerging conductive nanomaterial with applications including thin film transistors, interconnects, and sensors. In this letter, we demonstrate the fabrication of single-walled carbon nanotube (SWNT) networks on a flexible polymer substrate and then provide encapsulation utilizing a thin parylene-C layer. The encapsulated SWNT network was subjected to tensile tests while its electrical resistance was monitored. Tests showed a linear-elastic response up to a strain value of 2.8% and nearly linear change in electrical resistance in the 0%–2% strain range. The networks’ electrical resistance was monitored during load-unload tests of up to 100 cycles and was hysteresis-free.