Chip-Scale Nanophotonic Chemical and Biological Sensors Using CMOS Process

Lincoln Bollschweiler, Boise State University
Alex English, Boise State University
R. Jacob Baker, Boise State University
Wan Kuang, Boise State University
Zi-Chang Chang, National Chiao Tung University
Ming-Hsiung Shih, National Chiao Tung University
William Knowlton, Boise State University

Article comments

©2008 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. DOI: 10.1109/MWSCAS.2009.5235915

Abstract

A monolithic integrated chip-scale surface plasmon resonance (SPR) sensor is demonstrated. The device consists of a pn photodiode covered with a periodic modified thin metal film whose lattice constant is on the order of the wavelength of light. The device performs real-time measurement of resonant wavelengths of enhanced optical transmission due to surface plasmon resonance, which are influenced by the presence of chemical or biological materials at the device’s surface.