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Selected Works of T. -C. Shen
Article
Metal silicide patterning: a new approach to silicon nanoelectronics
Nanotechnology (1996)
  • J. R. Tucker
  • C. Wang
  • T. -C. Shen, Utah State University
Keywords
  • metal silicide,
  • patterning,
  • nanoelectronics
Publication Date
January 1, 1996
Citation Information
J. R. Tucker, C. Wang and T.-C. Shen,"Metal silicide patterning: a new approach to silicon nanoelectronics," Nanotechnology 7, 275 (1996).