Articles
100nm Thick Aluminum Nitride Based Piezoelectric Nano Switches Exhibiting 1mV Threshold Voltage Via Body-Biasing (with Zhijun Guo, Valeriy Felmetsger, and Gianluca Piazza), Proceedings of 2010 Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2010) (2010)
This paper reports on the first demonstration of aluminum nitride (AlN) piezoelectric logic switches that...
DEMONSTRATION OF LOW VOLTAGE AND FUNCTIONALLY COMPLETE LOGIC OPERATIONS USING BODY-BIASED COMPLEMENTARY AND ULTRA-THIN ALN PIEZOELECTRIC MECHANICAL SWITCHES (with Timothy S. Jones, Zhijun Guo, and Gianluca Piazza), Proceedings of 2010 MicroElectroMEchanical Systems Conference (MEMS 2010) (2010)
This paper reports, for the first time, on the demonstration of low voltage and functionally...
Piezoelectric aluminum nitride nanoelectromechanical actuators (with Graham E. Wabiszewski, Rashed Mahameed, Valery V. Felmetsger, Shawn M. Tanner, Robert W. Carpick, and Gianluca Piazza), Applied Physics Letter (2009)
This letter reports the implementation of ultrathin (100 nm) aluminum nitride (AlN) piezoelectric layers for...
Body-Biased Complementary Logic Implemented Using AlN Piezoelectric MEMS Switches (with Timothy S. Jones, Zhijun Guo, and Gianluca Piazza), Proceedings of 2009 IEEE International Electron Devices Meeting (IEDM 2009) (2009)
This paper reports on the first implementation of low voltage complementary logic (< 1.5 V)...
Integration of AlN Micromechanical Contour-Mode Technology Filters with Three-Finger Dual Beam AlN MEMS Switches (with Rashed Mahameed, Chengjie Zuo, and Gianluca Piazza), 2009 Joint Meeting of the European Frequency and Time Forum and the IEEE International Frequency Control Symposium (2009)
In this paper, we present the first demonstration of the monolithic integration of Aluminum Nitride...
Ultra Thin AlN Piezoelectric Nano-Actuators (with Graham E. Wabiszewski, Rashed Mahameed, Valery V. Felmetsger, Shawn M. Tanner, Robert W. Carpick, and Gianluca Piazza), The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009) (2009)
This paper reports the first implementation of ultra thin (100 nm) Aluminum Nitride (AlN) piezoelectric...
Dual-Beam Actuation of Piezoelectric AlN RF MEMS Switches Monolithically Integrated with AlN Contour-Mode Resonators (with Rashed Mahameed, Marcelo B. Pisani, and Gianluca Piazza), Departmental Papers (ESE) (2008)
This work reports on piezoelectric Aluminum Nitride (AlN) based dual-beam RF MEMS switches that have...
Multi-Frequency Pierce Oscillators Based On Piezoelectric AlN Contour-Mode MEMS Resonators (with Chengjie Zuo, Jan Van der Spiegel, and Gianluca Piazza), Departmental Papers (ESE) (2008)
This paper reports on the first demonstration of multi-frequency (176, 222, 307, and 482 MHz)...
Dual Beam Actuation of Piezoelectric AlN RF MEMS Switches Integrated with AlN Contour-mode Resonators (with Rashed Mahamameed, Chengjie Zuo, Marcelo B. Pisani, Carlos R. Perez, and Gianluca Piazza), 2008 Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2008) (2008)
This work reports on piezoelectric Aluminum Nitride (AlN) based dual-beam RF MEMS switches that have...
Hybrid Ultra-Compact 4th Order Band-Pass Filters Based On Piezoelectric AlN Contour-Mode MEMS Resonators (with Chengjie Zuo, Carlos R. Perez, Rashed Mahameed, Marcelo B. Pisani, and Gianluca Piazza), 2008 Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2008) (2008)
This work reports on the design, fabrication and testing of a new class of hybrid...
Gravimetric chemical sensor based on the direct integration of SWNTS on ALN Contour-Mode MEMS resonators (with Matteo Rinaldi, Chiara Zuniga, Marzie Taheri, Samuel M. Khamis, Alan T. Johnson, and Gianluca Piazza), Departmental Papers (ESE) (2008)
This paper reports on the first demonstration of a gravimetric chemical sensor based on direct...
Channel-Select RF MEMS Filters Based On Self-Coupled A1N Contour-Mode Piezoelectric Resonators (with Chengjie Zuo, Marcelo B. Pisani, Carlos R. Perez, Rashed Mahameed, and Gianluca Piazza), Departmental Papers (ESE) (2007)
This paper reports experimental results on a new class of single-chip multi-frequency channel-select filters based...