Presentation
In situ
Optical Imaging and Laser Processing in the SEM/FIB: A True E
IPBN System
Mechanical and Aerospace Engineering Faculty Publications
Document Type
Presentation
Publication Date
1-1-2011
Disciplines
Citation Information
N.A. Roberts
, J.D. Fowlkes, P.D. Rack, G.A. Magel, H.M. Marchman, C.D. Ha
rtfield and T.M. Moore, In situ
Optical Imaging and Laser Processing in the SEM/FIB: A True E
IPBN System, 55th International Conference
on Electron, Ion, Photon Beam Technology and Nanofabricati
on, May 31- June 3, 2011, Las Vegas, NV, USA.