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Synchrotron XPS and EXAFS Identification of Chemical State and Crystal Phase Changes of HfO2 Films Doped with Si, N, Al, and La (with P.S. Lysaght, J.C. Woicik, Mehmet A. Sahiner, C.S Park, J. Huang, G. Bersuker, W. Taylor, P.D. Kirsch, and R. Jammy), VLSI Technology Systems and Applications (VLSI-TSA), 2010 International Symposium (2010)