RF MEMS

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Dual Beam Actuation of Piezoelectric AlN RF MEMS Switches Integrated with AlN Contour-mode Resonators (with Nipun Sinha, Rashed Mahamameed, Chengjie Zuo, Carlos R. Perez, and Gianluca Piazza), 2008 Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2008) (2008)

This work reports on piezoelectric Aluminum Nitride (AlN) based dual-beam RF MEMS switches that have...

 

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Hybrid Ultra-Compact 4th Order Band-Pass Filters Based On Piezoelectric AlN Contour-Mode MEMS Resonators (with Chengjie Zuo, Nipun Sinha, Carlos R. Perez, Rashed Mahameed, and Gianluca Piazza), Departmental Papers (ESE) (2008)

This work reports on the design, fabrication and testing of a new class of hybrid...

 

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Channel-Select RF MEMS Filters Based On Self-Coupled A1N Contour-Mode Piezoelectric Resonators (with Chengjie Zuo, Nipun Sinha, Carlos R. Perez, Rashed Mahameed, and Gianluca Piazza), Departmental Papers (ESE) (2007)

This paper reports experimental results on a new class of single-chip multi-frequency channel-select filters based...