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Effects of substrate temperature and near-substrate plasma density on the properties of dc magnetron sputtered aluminum doped zinc oxide

Nathan W. Schmidt, Macalester College
Thomas S. Totushek, Macalester College
William A. Kimes, Macalester College
David R. Callender, Macalester College
James Doyle, Macalester College

Suggested Citation

Nathan W. Schmidt, Thomas S. Totushek, William A. Kimes, David R. Callender, and James Doyle. "Effects of substrate temperature and near-substrate plasma density on the properties of dc magnetron sputtered aluminum doped zinc oxide" Journal of Applied Physics 94.9 (2003): 5514-5521.