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Article
A bubble-powered micro-rotor: conception, manufacturing, assembly and characterization
Journal of Micromechanics and Microengineering (2007)
  • Jonathan Kao
  • Xiaolin Wang
  • John Warren, Brookhaven National Laboratory
  • Jie Xu, Columbia University
  • Daniel Attinger, Columbia University
Abstract
A steady fluid flow, called microstreaming, can be generated in the vicinity of a micro-bubble excited by ultrasound. In this paper, we use this phenomenon to assemble and power a microfabricated rotor at rotation speeds as high as 625 rpm. The extractible power is estimated to be of the order of a few femtowatts. A first series of experiments with uncontrolled rotor shapes is presented, demonstrating the possibility of this novel actuation scheme. A second series of experiments with 65 µm rotors micromanufactured in SU-8 resin is then presented. Variables controlling the rotation speed and rotor stability are investigated, such as the bubble diameter, the acoustic excitation frequency and amplitude and the rotor geometry. Finally, an outlook is provided on developing this micro-rotor into a MEMS-based motor capable of delivering tunable, infinitesimal rotary power at the microscale.
Disciplines
Publication Date
December, 2007
Publisher Statement
This is a manuscript from Journal of Micromechanics and Microengineering 17 (2007): 2454, doi:10.1088/0960-1317/17/12/010. Posted with permission.
Citation Information
Jonathan Kao, Xiaolin Wang, John Warren, Jie Xu, et al.. "A bubble-powered micro-rotor: conception, manufacturing, assembly and characterization" Journal of Micromechanics and Microengineering Vol. 17 Iss. 12 (2007)
Available at: http://works.bepress.com/daniel_attinger/15/