Channel-Select RF MEMS Filters Based On Self-Coupled A1N Contour-Mode Piezoelectric Resonators

Chengjie Zuo, University of Pennsylvania
Nipun Sinha, University of Pennsylvania
Marcelo B. Pisani, University of Pennsylvania
Carlos R. Perez, University of Pennsylvania
Rashed Mahameed, University of Pennsylvania
Gianluca Piazza, University of Pennsylvania

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Copyright 2007 IEEE. Reprinted from IEEE Ultrasonics Symposium, November 2007, pages 1158-1159.
Publisher URL: http://dx.doi.org/10.1109/ULTSYM.2007.292

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Abstract

This paper reports experimental results on a new class of single-chip multi-frequency channel-select filters based on self-coupled aluminum nitride (A1N) contour-mode piezoelectric resonators. For the first time, two-port AlN contour-mode resonators are connected in series and electrically coupled using their intrinsic capacitance to form multi-frequency (94 – 271 MHz), narrow bandwidth (~0.3%), low insertion loss (~4 dB), high off-band rejection (~60 dB) and extremely linear (IIP3 ~110 dBm) channel-select filters. This novel technology enables multi-frequency, high-performance and small form factor filter arrays and makes a single-chip multi-band RF solution possible in the near future.