Pulsed laser ablation deposition of nanocrystalline exchange-coupled Ni₁₁Co₁₁Fe₆₇₋ₓZr₇B₄Cux (x=0,1) films for planar inductor applications
Originally published in Journal of Applied Physics 101, 09M519 (2007). DOI:10.1063/1.2712055 (http://dx.doi.org/10.1063/1.2712055).
Nanocrystalline films of the Ni₁₁Co₁₁Fe₆₇₋ₓZr₇B₄Cux (x=0,1) composition were deposited on fused quartz substrates by pulsed laser deposition. For the films ofNi₁₁Co₁₁Fe₆₆Zr₇B₄Cu, the bcc grain size ranged from 5 to 8 nm in the films deposited at substrate temperatures from ambient to 300°C. Films grown at a substrate temperature of 300°C were found to have optimal magnetic properties including minima in the coercivity and ferromagnetic resonance (FMR) linewidth. The magnetic characterization studies showed coercivity Hc < 5 Oe, 4πMs ∽16 kG, and in-plane uniaxial anisotropy field (HA)∽25-30 Oe. The ferromagnetic resonance linewidth was measured to be 34 Oe and zero magnetic field ferromagnetic resonance at ∽2 GHz. These properties allow these films to be candidates for magnetic planar inductors operating from 0.5 to 2 GHz.
Ashish K. Baraskar, Soack Dae Yoon, Anton Geiler, Aria Yang, C. N. Chinnasamy, Yajie Chen, Nian Sun, Carmine Vittoria, Ramasis Goswami, Matthew Willard, and Vincent G. Harris. "Pulsed laser ablation deposition of nanocrystalline exchange-coupled Ni₁₁Co₁₁Fe₆₇₋ₓZr₇B₄Cux (x=0,1) films for planar inductor applications" Electrical and Computer Engineering Faculty Publications (2007).
Available at: http://works.bepress.com/cvittoria/119