"The Direct Patterning of Nanoporous Interlayer Dielectric Insulator Films by Nanoimprint Lithography" by Alamgir Karim

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The Direct Patterning of Nanoporous Interlayer Dielectric Insulator Films by Nanoimprint Lithography

Department of Polymer Engineering (2007)

Alamgir Karim

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Disciplines

Chemical Engineering and
Engineering

Publication Date

October 1, 2007

Citation Information

Alamgir Karim. "The Direct Patterning of Nanoporous Interlayer Dielectric Insulator Films by Nanoimprint Lithography" Department of Polymer Engineering Vol. 19 (2007)
Available at: http://works.bepress.com/alamgit_karim/25/