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Article
The fabrication of all-silicon micro gas chromatography columns using gold diffusion eutectic bonding
Journal of Micromechanics and Microengineering (2010)
  • A D Radadia, University of Illinois at Urbana–Champaign
  • A Salehi-Khojin, University of Illinois at Urbana–Champaign
  • R I Masel, University of Illinois at Urbana–Champaign
  • M A Shannon, University of Illinois at Urbana–Champaign
Publication Date
January 1, 2010
DOI
10.1088/0960-1317/20/1/015002
Citation Information
A D Radadia, A Salehi-Khojin, R I Masel and M A Shannon. "The fabrication of all-silicon micro gas chromatography columns using gold diffusion eutectic bonding" Journal of Micromechanics and Microengineering Vol. 20 Iss. 1 (2010) p. 15002
Available at: http://works.bepress.com/adarsh-radadia/32/